Companies / B / Brooks Automation, Inc.
Brooks Automation, Inc.
Manufacturer · Chelmsford, MA
About Brooks Automation, Inc.
Manufacturer of semiconductor automation equipment and cryogenic vacuum systems headquartered in Chelmsford, MA. Products include atmospheric and vacuum wafer-handling robots, equipment front end modules (EFEMs), ion implant automation, Polycold cryopumps, and atmospheric storage systems for semiconductor fabs. Serves semiconductor, flat panel display, and solar industries. Formerly a division of Brooks Instrument.
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